I used to follow browser-based flash games back when those were a thing, and Zachtronics was a real standout. So I played a bunch of the freeware games, including Codex of Alchemical Engineering (which I believe is the precursor to Opus Magnum), KOHCTPYKTOP (pronounced "constructor"), the Bureau of Steam Engineering, and Ruckingenur. I never played Infiniminer, though my understanding is that it was the direct inspiration of Minecraft. Among the freeware games, I would most recommend KOHCTPYKTOP, which allowed for some truly complex low-level programming. I also liked The Codex, but was less fond of The Bureau. Ruckingenur was IIRC fine but not really a programming puzzle game of the sort that Zachtronics is known for.
I've also played a few of the later games, including SpaceChem, Infinifactory, and TIS-100. Infinifactory is my favorite of those, because it's the least cramped. Personally I find it less stressful that the main constraints are scores and aesthetics, rather than hard walls and crashing chemicals. I also enjoyed the opportunity to make really big objects. I was considering getting Opus Magnum, but while I often enjoy these games as I play them, I feel hesitant about getting into a new one.